| 摘要 |
PROBLEM TO BE SOLVED: To provide a machining device capable of precisely machining a mold having fine shapes and provide a method of machining. SOLUTION: The machining device is provided with a machining table which holds an object to be machined and smoothly moves the object to be machined in a horizontal direction, a machining head which is located above the machining table, holds a machining tool for machining the object to be machined and can position a relative position between the object to be machined and the machining tool by moving the machining tool in a vertical direction and a displacement measurement detection device which measures a distance between the machining head and the machining table, and at the time of machining, the displacement measurement detection device measures a relative distance between the machining head and the machining table, whose measurement is reflected to a positioning command value to the machining head to perform machining. COPYRIGHT: (C)2004,JPO
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