| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus of which the cover case can easily be cleaned. SOLUTION: The plasma treatment apparatus comprises a lower part electrode 3, a cover case 10 covering over the lower part electrode 3 in a freely openable and closable manner, a gas supply part 12 for supplying a gas for plasma generation to a treatment chamber 11 in the cover case 10, and a vacuum pump 15 for vacuum-evacuating the treatment chamber 11 and which carries out plasma treatment of surface of a work 4 in the treatment chamber 11. The inner surface of the cover case 10 is made specular by sticking a glass plate 7 or the like. Accordingly, the cover case 10 can easily be cleaned by opening the cover case 10, wiping the inner surface of the cover case 10 and removing particles adhering to the inner surface of the cover case 10. COPYRIGHT: (C)2004,JPO
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