| 摘要 |
PROBLEM TO BE SOLVED: To provide a selector valve device used in vacuum suction of members such as semiconductor chips for performing vacuum break quickly and smoothly. SOLUTION: The device is provided with a vacuum suction selector valve function for vacuum suction, a vacuum breaking selector valve function for vacuum breaking, and an atmospheric releasing selector valve function that interlocks with the operation of the vacuum suction selector valve function to open the path to atmosphere side when the vacuum suction selector valve function is off, and to shut the path to atmosphere side when on, and is characterized in that the vacuum suction selector valve function, the vacuum break selector valve function, and the atmospheric releasing selector valve function are incorporated integrally in the main part. COPYRIGHT: (C)2004,JPO |
