| 摘要 |
A method for moving a substrate to a predetermined location with a specified orientation with a robotic manipulator, the robotic manipulator having a plurality of joint actuators and an end-effector for holding the substrate, wherein the end-effector is independently rotatable with respect to the remaining robotic manipulator. The method can select a reference point on the end-effector for determining a position of the end-effector, wherein the reference point is offset from a wrist of the robotic manipulator, determining a motion path for movement of the end-effector of robotic arm toward predetermined location with specified orientation, and generating motion profiles for translational and rotational components of movement of the end-effector of robotic manipulator along the motion path. The motion profiles are converted into joint motion profiles for each of the joint actuators of the robotic manipulator for implementing the movement of the end-effector to predetermined location with the specified orientation.
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