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发明名称
Method and apparatus for using scatterometry to perform feedback and feed-forward control
摘要
申请公布号
US6643557(B1)
申请公布日期
2003.11.04
申请号
US20000591038
申请日期
2000.06.09
申请人
ADVANCED MICRO DEVICES, INC.
发明人
MILLER MICHAEL L.;TOPRAC ANTHONY J.
分类号
H01L21/027;H01L21/02;H01L21/66;(IPC1-7):G06F19/00
主分类号
H01L21/027
代理机构
代理人
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