| 摘要 |
A statistically uniform micro-texture on a polishing pad surface improves break-in preconditioning time, and is measured by:Land Surface Roughness, Ra, from about 0.01 mum to about 25 mum;Average Peak to Valley Roughness, Rtm, from about 2 mum to about 40 mum;Core roughness depth, Rk, from about 1 to about 10;Reduced Peak Height, Rpk, from about 0.1 to about 5;Reduced Valley Height, Rvk, from about 0.1 to about 10; andPeak density expressed as a surface area ratio, RSA, ([Surf.Area/(Area-1)]), 0.001 to 2.0.
|
