| 摘要 |
The invention provides a method for measuring PFC components in a discharged gas with ease and good reproducibility, using an FT-IR. The method for measuring greenhouse gases using an infrared absorption spectrometer in accordance with the present invention includes the steps of selecting a process chemical material, selecting a measurement target chemical material corresponding to the process chemical material, designating expected concentration ranges for the process chemical material and the measurement target chemical material, selecting libraries for the respective expected concentration ranges for the process chemical material and the measurement target chemical material, and analyzing data obtained by a gas infrared absorption spectrometry based on the libraries. |
