发明名称 Microoptoelectromechanical system (MOEMS) based laser
摘要 A method for forming a folded laser and associated laser device includes providing a waveguide substrate, micromachining the waveguide substrate to form a folded waveguide structure including a plurality of intersecting folded waveguide paths, forming a single fold mirror having a plurality of facets which bound all ends of said waveguide paths except those reserved for resonator mirrors, and disposing a pair of resonator mirrors on opposite sides of the waveguide to form a lasing cavity. A lasing material is provided in the lasing cavity. The laser can be sealed by disposing a top on the waveguide substrate. The laser can include a re-entrant cavity, where the waveguide substrate is disposed therein, the re-entrant cavity including the single fold mirror.
申请公布号 US6643313(B2) 申请公布日期 2003.11.04
申请号 US20010849922 申请日期 2001.05.04
申请人 UT BATTELEE, LLC 发明人 HUTCHINSON DONALD P.
分类号 H01S3/063;H01S3/081;H01S3/23;(IPC1-7):H01S3/03 主分类号 H01S3/063
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