发明名称 |
Acetylenic diol surfactant solutions and methods of using same |
摘要 |
Aqueous solutions comprising one or more acetylenic diol type surfactants are used to improve the wettability of a substrate surface by lowering the contact angle of the aqueous developer solution are enclosed herein. In one embodiment, the aqueous solution is used to prepare the surface of the substrate prior to development of the resist coating layer.
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申请公布号 |
US6641986(B1) |
申请公布日期 |
2003.11.04 |
申请号 |
US20020218068 |
申请日期 |
2002.08.12 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
ZHANG PENG;KING DANIELLE MEGAN;KARWACKI EUGENE JOSEPH;BARBER LESLIE COX |
分类号 |
G03F7/11;B01F17/00;B01F17/42;C11D1/72;G03F7/004;G03F7/16;G03F7/32;G03F7/38;H01L21/027;(IPC1-7):G03F7/30;C11D17/00;B01D12/00 |
主分类号 |
G03F7/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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