发明名称 Method for forming a micro-pattern
摘要 The method of forming a micro-pattern comprising forming an organic thin film by building up monomolecular films on an insulating substrate; heating and baking the organic thin film to turn the organic thin film into an amorphous carbon or graphite film, thereby providing an electroconductive thin film; and processing the organic thin film by conducting a microcutting work on it while holding a probe in contact with the organic thin film by means of atomic force to produce the micro-pattern.
申请公布号 US6640433(B1) 申请公布日期 2003.11.04
申请号 US19980076235 申请日期 1998.05.12
申请人 CANON KABUSHIKI KAISHA 发明人 KURODA RYO;MATSUDA HIROSHI;TAKIMOTO KIYOSHI
分类号 G02B21/00;G01Q60/24;G01Q80/00;H01L21/28;H01L21/3205;H01L21/768;H01L29/06;H01L29/80;H05K3/04;H05K3/10;(IPC1-7):H05K3/02 主分类号 G02B21/00
代理机构 代理人
主权项
地址