发明名称 |
Method for forming a micro-pattern |
摘要 |
The method of forming a micro-pattern comprising forming an organic thin film by building up monomolecular films on an insulating substrate; heating and baking the organic thin film to turn the organic thin film into an amorphous carbon or graphite film, thereby providing an electroconductive thin film; and processing the organic thin film by conducting a microcutting work on it while holding a probe in contact with the organic thin film by means of atomic force to produce the micro-pattern.
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申请公布号 |
US6640433(B1) |
申请公布日期 |
2003.11.04 |
申请号 |
US19980076235 |
申请日期 |
1998.05.12 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KURODA RYO;MATSUDA HIROSHI;TAKIMOTO KIYOSHI |
分类号 |
G02B21/00;G01Q60/24;G01Q80/00;H01L21/28;H01L21/3205;H01L21/768;H01L29/06;H01L29/80;H05K3/04;H05K3/10;(IPC1-7):H05K3/02 |
主分类号 |
G02B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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