发明名称 Isolated junction structure for a MOSFET
摘要 A MOSFET structure in which the channel region is contiguous with the semiconductor substrate while the source and drain junctions are substantially isolated from the substrate, includes a dielectric volume formed adjacent and subjacent to portions of the source and drain regions.In a further aspect of the invention, a process for forming an isolated junction in a bulk semiconductor includes forming a dielectric volume adjacent and subjacent to portions of the source and drain regions.
申请公布号 US6642557(B2) 申请公布日期 2003.11.04
申请号 US19990289424 申请日期 1999.04.09
申请人 INTEL CORPORATION 发明人 LIANG CHUNLIN
分类号 H01L21/336;H01L21/762;H01L21/764;H01L29/06;(IPC1-7):H01L27/10 主分类号 H01L21/336
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