Ferro-electric capacitor and method of fabrication of the ferro-electric capacitor

摘要

A ferro-electric capacitor comprising a first electrode comprising at least a layer of a conductive oxide having at least two sub-layers of individual grains, wherein individual grains of a top sub-layer of the two sub-layers are oriented randomly. The capacitor further comprises a second electrode that is isolated from said first electrode. The capacitor further comprises a ferro-electric PZT layer that is sandwiched between said first electrode and said second electrode. A method of making the ferro-electric capacitor is also provided.