SINGLE AXIS MANIPULATOR WITH CONTROLLED COMPLIANCE,申请号AU20030221925-传众专利搜索

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发明名称	SINGLE AXIS MANIPULATOR WITH CONTROLLED COMPLIANCE
摘要
申请公布号	AU2003221925(A1)	申请公布日期	2003.11.03
申请号	AU20030221925	申请日期	2003.04.14
申请人	TERADYNE, INC.	发明人	MICHAEL, A. CHIU;NEIL, R. BENTLEY
分类号	G01R31/26;H01L21/68	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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