发明名称 |
Process modules for transport polymerization of low dieletric constant thin films |
摘要 |
<p>A Process Module ("PM") is designed to facilitate Transport Polymerization ("TP") of precursors that are useful for preparations of low Dielectric Constant ("∈") films. The PM consists primarily of a Material Delivery System ("MDS") with a high temperature Vapor Phase Controller ("VFC"), a TP Reactor, a Treatment Chamber, a Deposition Chamber and a Pumping System. The PM is designed to facilitate TP for new precursors and for film deposition and stabilization processes.</p> |
申请公布号 |
AU2003226238(A8) |
申请公布日期 |
2003.11.03 |
申请号 |
AU20030226238 |
申请日期 |
2003.04.03 |
申请人 |
DIELECTRIC SYSTEMS, INC. |
发明人 |
JAMES YU CHUNG CHANG;WEI SHIANG CHARLES LEE;ATUL KUMAR;MICHAEL SOLOMENSKY;CHUNG J. LEE;BINH NGUYEN;OANH NGUYEN |
分类号 |
B05D1/00;B05D3/06;B05D7/24;C23C16/452;H01L21/312;(IPC1-7):C23C16/30 |
主分类号 |
B05D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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