ALUMINUM NITRIDE MATERIAL AND MEMBER FOR MANUFACTURING SEMICONDUCTOR,申请号KR20030024640-传众专利搜索

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发明名称	ALUMINUM NITRIDE MATERIAL AND MEMBER FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号	KR20030084617(A)	申请公布日期	2003.11.01
申请号	KR20030024640	申请日期	2003.04.18
申请人		发明人
分类号	C04B35/581;H01L21/683	主分类号	C04B35/581
代理机构		代理人
主权项
地址

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