MICRO VARIABLE CAPACITOR AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A micro variable capacitor and a fabricating method thereof are provided to vary the capacitance and reduce the power consumption by driving a plurality of ribbon-shaped upper electrodes. CONSTITUTION: A micro variable capacitor includes an insulating substrate(1), a bottom electrode(2), and a plurality of ribbon-shaped upper electrodes(3). The bottom electrode(2) is formed to one direction on the insulating substrate(1). The bottom electrode(2) and the ribbon-shaped upper electrodes(3) intersect at the right angle. Both ends of the ribbon-shaped upper electrodes(3) is fixed on the insulating substrate(1). The bottom electrode(2) is located within a groove which is formed on the insulating substrate(1). The ribbon-shaped upper electrodes(3) are formed with nitride layers and metal layers.