MICRO ACTUATOR AND FABRICATION METHOD THEREOF

摘要

PURPOSE: A micro actuator and a fabrication method thereof are provided, which has an amplified displacement by forming electrodes with different polarity at a zigzag prolonged part. CONSTITUTION: The first and the second anchor(15a,15b) are fixed on the upper part of a substrate(10) by being separated each other. A zigzag prolonged part is formed in a zigzag shape from the first anchor to the second anchor, and is floated from the substrate, and includes a stacked structure of a bottom electrode and a piezoelectric film. The first top electrode group has top electrodes with different polarity by being separated on the piezoelectric film of the zigzag prolonged part prolonged from the first anchor. And the second top electrode group is symmetrical to the first top electrode group, and has top electrodes with different polarity on the piezoelectric film of the zigzag prolonged part prolonged from the second anchor.