EDVC TFBAR AND VOLTAGE CONTROLLED OSCILLATOR USING THE SAME

摘要

PURPOSE: An EDVC(Electrostatically Driving Voltage Controlled) TFBAR(Thin Film Bulk Acoustic Resonator) and a voltage controlled oscillator using the same are provided to improve a phase noise characteristic by using a TFBAR for changing a resonant frequency according to a variation of stress. CONSTITUTION: An EDVC TFBAR includes a fixing portion(12), a driving portion(11), and a TFBAR(10). A position of the fixing portion(12) is not changed regardlessly of the electrostatic force which is generated according to a voltage applied to an electrode. The driving portion(11) is shifted to the fixing portion(12) by the electrostatic force which is generated according to a voltage applied to an electrode. The TFBAR(10) changes a resonant frequency according to a variation of stress which is generated by the movement of a moving portion.