APPARATUS AND METHOD FOR MAKING POGO PIN CONTACT POGO FIXING UNIT OF SEMICONDUCTOR INSPECTING APPARATUS

摘要

PURPOSE: A method for making a pogo pin contact a pogo fixing unit of a semiconductor inspecting apparatus is provided to prevent a probe card from being transformed by supplying vacuum absorption force from the probe card while a test head stands by in a predetermined position and is capable of moving. CONSTITUTION: The test head(15) decreases by its own weight. Air with a controlled predetermined pressure is supplied to make the test head stand by in a predetermined position while the test head is capable of moving. A vacuum absorption operation is performed in the probe card(13). The test head decreases by vacuum absorption force so that the pogo pin(14a) comes in contact with the pogo fixing unit(13a).