METHOD FOR MANUFACTURING HIGH POWER LASER DIODE

摘要

PURPOSE: A method for manufacturing a high power laser diode is provided to remove the patterning portion of the dielectric layer used as a current block layer(CBL) to contact with the metal without departing from the range of the patterning portion. CONSTITUTION: A method for manufacturing a high power laser diode includes the steps of: coating a negative photoresist layer after forming a SiNx stack layer(314) and performing a soft baking; coating a positive photoresist thereon; forming an open pattern in a wide area having a ridge; removing the photoresist layer by using a plasma etching; and etching the SiNx stack layer(314) after performing the plasma etching and removing the photoresist layer served as a mask.