| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for stably and repeatedly electrostatically attracting a substrate at the time of performing treatment in a vacuum. SOLUTION: This substrate discharging device for removing electric charges remaining in the substrate in a vacuum comprises an airtight cassette chamber 3 constituted so as to introduce prescribed gas 50 for discharging for housing the substrate 20 to be discharged and an ultraviolet ray irradiation means 60 for irradiating the gas 50 for discharging introduced to the cassette chamber 3 with ultraviolet rays 62. Consequently, even when electrostatic attraction is repeated, the residual electric charges are not accumulated in the substrate 20. COPYRIGHT: (C)2004,JPO |
