| 摘要 |
PROBLEM TO BE SOLVED: To provide a composite module in which an inductor and a capacitor are formed on the same substrate and which can be used for a high-frequency module such as the power amplifier, etc., and to provide a method of manufacturing the module. SOLUTION: In this composite module, the capacitor and the inductor are provided at different positions on the surface of the semiconductor substrate, and at the same time, a magnetic film is formed between the substrate and the inductor. In addition, a first interlayer insulating film having a thickness that makes the distance between the semiconductor substrate and magnetic film optimum is formed between the substrate and the magnetic film, and a second interlayer insulating film having a thickness that makes the distance between the magnetic film and inductor appropriate is formed between the magnetic film and the inductor. COPYRIGHT: (C)2004,JPO
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