| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the temperature of a vertical furnace having high temperature detecting accuracy, and to provide a method for heat treating and a boat used therefor. SOLUTION: The method for measuring the temperature of the vertical furnace comprises: a step of mounting a plurality of materials 63A to be treated and a temperature detector 65 in the boat 60, and setting the materials and the detector at treating positions in a vertical reaction tube 18; a step of setting in the tube 18 to a predetermined temperature by a heater 16; and a step of measuring a temperature distribution of a boat atmosphere by the detector 65 mounted in the boat 60. Thus, the temperature can be detected near the material 63A mounted in the boat 60, and hence the accuracy of the detecting temperature is raised. COPYRIGHT: (C)2004,JPO
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