| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump embodied in a very small construction, transporting a small volume of liquid, and having a high gauging accuracy obtained in a short time. SOLUTION: The diaphragm pump is structured so that a middle plate 203 is installed between two outer plates 201 and 205 to form a pumping chamber 211, the first shutoff chamber 210, and the second shutoff chamber 212, and is separated from the outer plates by diaphragms 202 and 204, which partition the pumping chamber and shutoff chambers into controlling spaces 220, 221, 222 and product spaces 230, 231, 232, wherein the product space 231 is connected with the product space 230 of the first shutoff chamber 210 through the first connection duct 208 and is connected with the product space 232 of the second shutoff chamber 212 through the second connection duct 209, and the controlling chambers are connected with control units 100 and 115 through control lines 119, 120, 121. COPYRIGHT: (C)2004,JPO
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