| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier capable of suppressing vibrations. SOLUTION: The carrier for carrying a substrate K to be treated in a vacuum treatment system for treating the substrate K to be treated is provided with a trunk 20 for traveling in the system, and a supporting mechanism 21 disposed to the truck 20 so as to support the substrate K to be treated. The supporting mechanism 21 and the truck 20 are in states of not contacting with each other across a wire rope vibration proof device (vibration absorption means) 25. COPYRIGHT: (C)2004,JPO |
