摘要 |
<P>PROBLEM TO BE SOLVED: To realize an inexpensive compact electron beam irradiation having a heightened processing capacity and exerting no biological influence or no optical influence on the inside of an irradiation object, by irradiating a purified electron beam having reduced X-rays included in the electron beam to the irradiation object, in a system for irradiating a low-energy electron beam from the whole periphery of an irradiation object passage. <P>SOLUTION: Accelerated electrons running on a circular cone-shaped orbit coaxial with the irradiation object passage are transmitted through a discoid electron transmission window, and concentrated toward the irradiation object passage by using a magnet provided coaxially therewith, and an X-ray distribution is restricted by using a coaxial collimator provided in front of the electron transmission window, to thereby irradiate only the purified electron beam onto the irradiation object in the irradiation object passage. <P>COPYRIGHT: (C)2004,JPO |