| 摘要 |
PROBLEM TO BE SOLVED: To provide a projection aligner that precisely matches the orientation and a reticle without providing any orientation marks on appearances such as orientation flats, notches and any scratch marks instead of the orientation ones. SOLUTION: The compact projection aligner 101 has a prealignment section 102 for orientating the orientation flat 1a toward a preset orientation. The prealignment section 102 comprises: a prealignment stage 13 for placing a semiconductor substrate 1; a rotary shaft 15 for connecting the prealignment stage 13 with a rotary driving motor 14; an X-ray source 104 for applying X rays onto the semiconductor substrate 1, and a scattered light detection section 105 for detecting diffracted X rays that are subjected to Bragg reflection from the semiconductor substrate 1, as a crystal orientation detection section 103 for detecting the crystal orientation of the semiconductor substrate 1; and a rotation control section 106 for rotating the prealignment stage 13 based on the signal. COPYRIGHT: (C)2004,JPO |
