| 摘要 |
PROBLEM TO BE SOLVED: To perform a beam scanning with high accuracy by adjusting the positions of a stationary laser beam and a movable laser beam with high accuracy. SOLUTION: First, the position of the stationary laser beam is detected by detecting which position of a photodetecting surface of a sensor the stationary laser beam passed. In succession, a position to which the movable laser beam is driven with respect to the stationary laser beam is determined. The control to bring the movable laser beam near to the driven position by a prescribed step is performed by adjusting a galvanomirror and unless the movable laser beam has moved to the driven position, the position detection of the stationary laser beam, the determination of the driven position of the movable laser beam and the control to the bring the movable laser beam near to the driven position are repeated until the movable laser beam moves to the driven position. The processing is ended upon judgment that the movable laser beam moves to the driven position. COPYRIGHT: (C)2004,JPO
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