| 摘要 |
PROBLEM TO BE SOLVED: To perform an accurate measurement even if a sample is reinstalled in a measuring apparatus for observing a time change in total reflection attenuation for the same measurement unit. SOLUTION: In a sensor for detecting light beams L1 that are totally reflected on an interface 11a while the light beams L1 are made incident at various angles to obtain total reflection conditions on an interface 11a on a thin-film layer 12 on a dielectric block 11, light beams L2 for measuring slope are made incident to the interface 11a, the light beams 12 for measuring inclination being reflected by the interface 11a are received by a light detection means 37, the slope between the first and second measurements for measuring the total reflection attenuation on the interface 11a is obtained, and the second measurement value is corrected by a signal-processing section 20 according to the obtained slope. COPYRIGHT: (C)2004,JPO
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