| 摘要 |
PROBLEM TO BE SOLVED: To provide a cooling apparatus for a linear slider which is high in cooling capacity and where the thermal transformation of a stator, etc., is suppressed, and accuracy in positioning of a table is high. SOLUTION: In the cooler of a linear slider, which is equipped with a stator 12 consisting of a field yoke 13, where a plurality of permanent magnets alternately different in polarity are arranged side by side in the longitudinal direction, a fixing block 11 where the stator 12 is arranged, a mover 22 consists of an armature 21 where armature coils are wound on a plurality of cores which are counterposed via a magnetic air gap to the row of permanent magnets in the longitudinal direction of the field yoke 13, an armature-mounting plate 23 where the armature 21 is attached, a table 24 attached to the armature- mounting plate 23, and in a space constituted of the armature-mounting plate 23 and the table 24, a first heat sink 31 and a cooling fan 35, the second heat sink 32 is provided in the space constituted of the mover 22 and the fixing block 11. COPYRIGHT: (C)2004,JPO
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