| 摘要 |
PROBLEM TO BE SOLVED: To quickly inspect a specimen containing a fine grating by using a simple inspection apparatus and a simple inspection method without using a transmission electron microscope. SOLUTION: From among diffracted light by the fine grating in the specimen (a mask for an EB aligner), information (a coupling efficiency) measured as a transmittance or a reflectance regarding 0-order diffracted light as direct light is acquired, the information is compared with an analytical result regarding the grating, and a shape of the grating is quantified. As a measuring priciple, the coupling efficiency at the grating which is unequvocally decided by an optical constant of an inspection apparatus, a mask physical property, a mask structure and the shape of the grating is measured, the shape of the grating, a duty especially in a very small grating part and a line width of an isolated line are measured, and a defect is inspected. COPYRIGHT: (C)2004,JPO
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