| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a guide apparatus wherein the accuracy in attitude of a movable member is easily adjustable, and the accuracy in attitude of the movable member in transit can be maintained. <P>SOLUTION: The guide apparatus 1 is constituted of at least one piezoelectric actuator 10, which is placed between a fixed member 2 and the movable member 3 and applies preload to a pair of roller guides 4 which guide the movable member 3; a first detecting means 11 which comprises any of a strain gauge, a capacity sensor, and a laser displacement gauge and detects the amount of expansion and contraction of the piezoelectric actuator 10; a second detecting means 21, which comprises a laser interferometer and the like and detects variations in the accuracy of attitude of the movable member 3; and a control portion 23, which controls a voltage applied to the piezoelectric actuator 10, based on a signal from the first detecting means 11 and a signal from the second detecting means 21. <P>COPYRIGHT: (C)2004,JPO |
