Process for manufacture of the planar optic device with waveguide

摘要

The invention relates to optoelectronics, in particular to processes for manufacture of optic devices with waveguides. The process for manufacture of the planar optic device with waveguide consists in that onto the substrate surface it is deposited a mask, there are implanted ions of high power and it is formed a waveguide. Novelty of the invention consists in that the waveguide is formed by electrochemical anodization of the non-implanted regions.Claims: 1Fig.: 1