THIN FILM SEMICONDUCTOR DEVICE, ELECTRO-OPTICAL DEVICE, THEIR MANUFACTURING METHOD, AND RETICLE

摘要

PROBLEM TO BE SOLVED: To provide a thin film semiconductor device without producing an undercut on a lower part of a thin film even when a pattern has an intersection part in patterning of the thin film, and to provide its manufacturing method.

SOLUTION: A semiconductor film (1) has the pattern including a bent shape or a projection shape. The bent or projected intersection is regulated, and a different line segment (1X) exists between one line segment (1AR) and the other line segment (1BU) in one adjacent line segment (1AR) and the other line segment (1BU). Smooth intersections (1K) are formed wherein an angle making another line segment and one line segment, and an angle making another line segment and the other line segment, are larger than 90° and smaller than 180°.

COPYRIGHT: (C)2004,JPO