| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting apparatus for appropriately performing an inspection without generating inconveniences such as halation regardless of the inspection region of an inspection target. SOLUTION: The inspecting apparatus comprises: imaging means 51-58 that are provided at the outer section of the inspection target; illuminating means 101-108 for lighting up the inspection target from a side where the imaging means 51-58 are arranged; and an image-processing section 16 for inspecting the inspection target based on the imaging data of the imaging means 51-58. The illuminating means 101-108 are provided while the illumination color is allowed to differ at each inspection region of the inspection target. COPYRIGHT: (C)2004,JPO
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