| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation detecting device where the signal component of a photoelectric conversion element is improved and sensitivity can be further improved, and to provide its manufacturing method. SOLUTION: By forming a transparent electrode layer 22 on an ohmic control layer 307, a hole-blocking function and an electrode function which are functions of an n<SP>+</SP>film are separated in terms of functions into the function of the n<SP>+</SP>film and the function of a transparent conductive layers. As a result, the n<SP>+</SP>film is thinned, and the light incidence efficiency and sensitivity of a photoelectric conversion element are improved. A patterning process of the transparent electrode layer is performed by using a mask identical to a mask used in a process of patterning a second metal layer of a switch TFT and a process of patterning an ohmic contact layer, so that an FPD is manufactured without increasing the number of masks. COPYRIGHT: (C)2004,JPO
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