| 摘要 |
PROBLEM TO BE SOLVED: To reduce a cost and to improve the reliability of a magnetic bearing spindle device by simplifying a manufacturing method of a position detecting sensor of a rotor built in a pump body. SOLUTION: A sensor coil 101 is arranged on a first printed circuit board 103, and the sensor coil is fixed to a second printed circuit board 102 via a fixing block 104 to constitute a sensor. Respective sensor parts are easily and accurately made by forming signal transmission patterns on the printed circuit boards 102 and 103, and the individual difference of a sensor unit can also be reduced, and the cost is reduced, and the reliability is improved. COPYRIGHT: (C)2004,JPO
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