| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical disk master exposing device feeding stage capable of realizing highly precise feeding and its controller. SOLUTION: A speed command pulse signal 100 from a whole controller which is not shown in a figure is connected to a phase comparator 102 for comparing the phase with the phase of the pulse output signal of a rotary encoder 26, and the output signal of the phase comparator 102 is converted into a speed difference signal by a phase compensator (1) 103 such as an integrated circuit, and inputted to an adder 104 for adding it to the output signal of an F/V converter (1) 106 for detecting speed fluctuation from the pulse output signal of a rotary encoder 26, and connected through a power amplifier 105 to a feeding driving motor 5 so that a speed control means (1) 108 can be configured. In this case, the fixed rotary control of only one of CW/CCW rotation is operated by the speed control means (1) 108. COPYRIGHT: (C)2004,JPO
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