| 摘要 |
PROBLEM TO BE SOLVED: To provide a VPD (vapor phase decomposing) device capable of preparing recovery liquid with less contamination at the time of preparing the recovery liquid. SOLUTION: The vapor phase decomposing device is provided with a recovery liquid housing container housing the recovery liquid, and a stock solution housing container housing a stock solution to be the base of the preparation of the recovery liquid respectively. The stock solution is supplied from the stock solution housing container to the recovery liquid housing container. At that time, the weight of the stock solution supplied to the recovery liquid housing container is monitored and the supply of the stock solution is controlled on the basis of the weight value. COPYRIGHT: (C)2004,JPO
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