发明名称 |
ANHYDROUS, LIQUID PHASE PROCESS FOR PREPARING HYDROXYL CONTAINING POLYMERS OF ENHANCED PURITY |
摘要 |
An anhydrous, liquid phase process for preparing hydroxyl containing polymer s of enhanced purity comprising the steps of polymerization, purification, transesterification, purification, catalyst removal, and solvent exchange. T he resultant polymer in solution can be used directly, without further processi ng steps, to prepare a photoresist composition. |
申请公布号 |
CA2482899(A1) |
申请公布日期 |
2003.10.30 |
申请号 |
CA20032482899 |
申请日期 |
2003.04.10 |
申请人 |
DUPONT ELECTRONIC TECHNOLOGIES L.P. |
发明人 |
SHEEHAN, MICHAEL T.;SOUNIK, JAMES R. |
分类号 |
C08F8/12;C08F6/02;C08F6/04;C08F6/06;C08F8/00 |
主分类号 |
C08F8/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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