发明名称 ANHYDROUS, LIQUID PHASE PROCESS FOR PREPARING HYDROXYL CONTAINING POLYMERS OF ENHANCED PURITY
摘要 An anhydrous, liquid phase process for preparing hydroxyl containing polymer s of enhanced purity comprising the steps of polymerization, purification, transesterification, purification, catalyst removal, and solvent exchange. T he resultant polymer in solution can be used directly, without further processi ng steps, to prepare a photoresist composition.
申请公布号 CA2482899(A1) 申请公布日期 2003.10.30
申请号 CA20032482899 申请日期 2003.04.10
申请人 DUPONT ELECTRONIC TECHNOLOGIES L.P. 发明人 SHEEHAN, MICHAEL T.;SOUNIK, JAMES R.
分类号 C08F8/12;C08F6/02;C08F6/04;C08F6/06;C08F8/00 主分类号 C08F8/12
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