发明名称 SEMICONDUCTOR COMPONENT COMPRISING AN INTEGRATED CAPACITOR STRUCTURE THAT HAS A PLURALITY OF METALLIZATION PLANES
摘要 The invention relates to a semiconductor component comprising an insulation layer, which is configured on the semiconductor substrate and in which a capacitor structure is formed (K). Said capacitor structure (K) comprises at least two parallel metallization planes (1, 2, 3, 6, 8), whereby at least one of said planes (1, 2, 3, 6, 8) is configured in a lattice and inhomogenous structures (1a to 1l; 10a, 10b), which are electrically connected to the first metallization plane (1, 2, 3, 6, 8), extend at least partially into the cavities of the latticework metallization plane (1, 2, 3, 6, 8).
申请公布号 WO03090283(A2) 申请公布日期 2003.10.30
申请号 WO2003DE01304 申请日期 2003.04.17
申请人 INFINEON TECHNOLOGIES AG;ABDALLAH, HICHEM;OEHM, JUERGEN 发明人 ABDALLAH, HICHEM;OEHM, JUERGEN
分类号 H01L21/02;H01L23/522;H01L27/08 主分类号 H01L21/02
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