| 摘要 |
<p>A manufacturing method for forming a thin-film device having multiple layers on a base material, comprising the step of forming at least one layer of the plurality of layers, the step characterized by further comprising the steps of moving the relative position of a nozzle for jetting liquid material containing the components of the one layer to the base material and jetting the liquid material from the nozzle toward the base material, wherein the liquid material is jetted from the nozzle in a film forming chamber (110) to apply the liquid material on the base material so as to form a thin-film, and the base material is heat-treated in a first heat treating part (103A) and a second heat treating part (103B), whereby the crystallization and compactness of the film and the adhesion of the film to the other film can be increased.</p> |
