VERFAHREN UND VORRICHTUNG ZUR TROCKNUNG EINES BESCHICHTETEN SUBSTRATS

摘要

A method and apparatus of drying a substrate uses a condensing surface located adjacent the substrate on the side of the substrate being dried. The liquid from the substrate is evaporated and then condensed on the condensing surface. The condensed liquid is moved on the condensing surface using at least capillary forces. The gap, temperature of said condensing surface, temperature of said substrate, or combinations thereof are controlled to control energy transport and to control gas phase mass transport of the vapor.