Verfahren zur Bearbeitung eines Halbleiterkristallblocks,申请号DE19966026360T-传众专利搜索

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发明名称	Verfahren zur Bearbeitung eines Halbleiterkristallblocks
摘要
申请公布号	DE69626360(T2)	申请公布日期	2003.10.30
申请号	DE19966026360T	申请日期	1996.11.21
申请人	AIR WATER INC., SAPPORO	发明人	YOSHINO, AKIRA;YOKOYAMA, TAKASHI;OHMORI, YOSHINORI;YAMAMOTO, KAZUMA
分类号	H01L21/3065;(IPC1-7):H01L21/306;B26F3/00	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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