LIGHT-WAVE CIRCUIT TYPE GAIN FLATTENING FILTER DEVICE AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A light-wave circuit type gain flattening filter device and a fabricating method thereof are provided to fabricate plural elements on one wafer and enhance the productivity by using a PLC(Planar Light-wave Circuit) fabrication method. CONSTITUTION: A light-wave circuit type gain flattening filter device includes a substrate(20), a bottom clad layer(21), an upper clad layer(26), and a core layer(22'). The bottom clad layer(21) is formed on an upper portion of the substrate(20). The upper clad layer(26) is formed on an upper portion of the bottom clad layer(21). The core layer(22') is formed between the bottom clad layer(21) and the upper clad layer(26). A grating pattern is formed on the core layer(22'). The bottom clad layer(21) and the upper clad layer(26) are formed with high density SiO2 layers. The core layer(22') is formed with SiO2-GeO2 layer.