NANO DEVICE USING NANO HOLES AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A nano device using nano holes and a manufacturing method thereof are provided to improve the luminescence efficiency by uniformly distributing nano holes and adjusting the size and density of the nano holes. CONSTITUTION: A metal layer is deposited on an upper surface of a substrate(13). Nano holes(30), each of which has a nano size, are formed by oxidizing the metal layer through anodic oxidation method. A nano frame is formed with a metal oxide in which the nano holes(30) are distributed. An epi-structure of a nano device is formed by growing a material layer within an inner of each nano hole(30). A lower electrode(11) is formed on a lower of the substrate(13). An upper electrode(17) is formed on upper surfaces of the epi-structure and the nano frame.