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发明名称
Sputterkathode
摘要
申请公布号
DE59809710(D1)
申请公布日期
2003.10.30
申请号
DE19985009710
申请日期
1998.08.19
申请人
UNAXIS DEUTSCHLAND HOLDING GMBH
发明人
ADAM, ROLF;BAEHR, DR.;KREMPEL-HESSE, DR.
分类号
C23C14/34;H01J37/34;(IPC1-7):H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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