| 发明名称 |
Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck |
| 摘要 |
The object of the present invention is to provide an aluminum nitride sintered body which has excellent mechanical strength and in which ceramic particles is prevented from coming off from the surface and/or side thereof and generation of free particles is suppressed. The aluminum nitride sintered body of the present invention is wherein it contains sulfur.
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| 申请公布号 |
US2003203225(A1) |
申请公布日期 |
2003.10.30 |
| 申请号 |
US20030442967 |
申请日期 |
2003.05.22 |
| 申请人 |
IBIDEN CO., LTD. |
发明人 |
HIRAMATSU YASUJI;ITO YASUTAKA |
| 分类号 |
C04B35/08;C04B35/10;C04B35/14;C04B35/565;C04B35/575;C04B35/581;C04B35/583;C04B35/584;H01L21/00;H01L21/68;H01L21/683;H05B3/14;H05B3/74;(IPC1-7):B32B9/00 |
主分类号 |
C04B35/08 |
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