发明名称 |
SELF-ASSEMBLED NANOBUMP ARRAY STRUCTURES AND A METHOD TO FABRICATE SUCH STRUCTURES |
摘要 |
A self-assembled nanobump array structure (1A) including a semi-absorbing outer layer provided on at least one nanobump-forming substrate layer (103), the semi-absorbing outer layer (102) configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate layer, (104) in which the self-assembled nanobump array structure is formed by an energy and a pressure buildup occurring in the at least one nanobump-forming substrate layer. |
申请公布号 |
WO03090284(A1) |
申请公布日期 |
2003.10.30 |
申请号 |
WO2003US11863 |
申请日期 |
2003.04.16 |
申请人 |
WAYNE STATE UNIVERSITY |
发明人 |
AUNER, GREGORY, W.;NAIK, RATNA;NG, SIMON;ABRAMS, GARY;MCCALLISTER, JAMES, PARICK;IEZZI, RAYMOND |
分类号 |
B23K35/36;G01N29/02;G01N29/24;G01N29/34;G11B5/855;H01F1/00;H01L21/20;H01L21/205;H01L21/44;H01L23/48;H01L31/00;H01L51/00;H01L51/10 |
主分类号 |
B23K35/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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