发明名称 SELF-ASSEMBLED NANOBUMP ARRAY STRUCTURES AND A METHOD TO FABRICATE SUCH STRUCTURES
摘要 A self-assembled nanobump array structure (1A) including a semi-absorbing outer layer provided on at least one nanobump-forming substrate layer (103), the semi-absorbing outer layer (102) configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate layer, (104) in which the self-assembled nanobump array structure is formed by an energy and a pressure buildup occurring in the at least one nanobump-forming substrate layer.
申请公布号 WO03090284(A1) 申请公布日期 2003.10.30
申请号 WO2003US11863 申请日期 2003.04.16
申请人 WAYNE STATE UNIVERSITY 发明人 AUNER, GREGORY, W.;NAIK, RATNA;NG, SIMON;ABRAMS, GARY;MCCALLISTER, JAMES, PARICK;IEZZI, RAYMOND
分类号 B23K35/36;G01N29/02;G01N29/24;G01N29/34;G11B5/855;H01F1/00;H01L21/20;H01L21/205;H01L21/44;H01L23/48;H01L31/00;H01L51/00;H01L51/10 主分类号 B23K35/36
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