FLOW SENSOR FOR HARSH ENVIRONMENTS

摘要

A sensor can be configured to generally include a flow channel block having a flow channel (121) formed therein, and a sensor chip (116) for sensing fluid flow, wherein a fluid flow channel (121) surrounds the sensor chip (116). Alternatively, the sensor chip (116) can be fastened at one side to a substrate and on another side of the substrate to a core tube (118) inserted into the flow channel (121). Core tube (118) generally provides electrical insulation and corrosion protection to the sensor chip (116), reduced flow noise, essentially eliminates the risk of fluid leakage, and maintains the fluid super-clean and contamination-free while improving structural integrity for the thermal measurements derived from the sensor chip (116).